One can ballpark it, during EUV commercialization, ASML had 15k employees, Zeiss 3k, Cymer 1k. 20 years of non priority commercial development, lots of setbacks. Final integration ~5k suppliers. For reference commercial aviation Boeing/Airbus with as 100k employees, 50k suppliers. And we don't even know it's correct technical roadmap. Initially they thought synchrotron better than plasma/LPP but went with latter because synchrotron too expensive, now EUV machine prices ballooned to multiple synchrotron price. Don't be surprise if we find it dead end non competitive tech in 5-10 years if PRC or JP figures out SSMB/FEL etc, LPP may become economically uncompetitive and all ASML EUV becomes stranded assets. This real possibly because while ASML LPP works, it works at far higher cost than original projections, i.e. it's overbudget techstack with lethal scaling costs.

On paper EUV relatively modest undertaking vs commercial aviation, EUV deeper integration vs commercial aviation breadth, but in terms of scale of effort for nation state coordination, EUV probably all things considered, easier to replicate because it has no regulatory slowdown, it's purely host country physics problem. Having enough talent and throwing it at problem x espionage x poaching talent x time will likely solve precision physics problem sooner than later. Vs commercial aviation which has complicated geopolitical/regulatory hurdles and magnitude more suppliers and scale. TLDR EUV has smaller organizational surface area for determined state to pursue through concentrating $$$, talent and effort. You can buy a ex ASML to bootstrap EUV development, much harder to get globe to buy COMAC without decades of airworthiness. There's a reason western analysts predict PRC EUV in 2030s (meanwhile PRC already beat prototype estimate timeline), but probably not realistic for global COMAC in same timeframe, and PRC been hammering at commercial aviation seriously long before EUV.