From the paper:

"Second, memory dominates the carbon footprint of the fleet [8], accounting for 69% of CO2 emissions and posing a significant sustainability challenge [4]. DRAM dominates datacenter embodied CO2 largely because it is ubiquitous and deployed in large quantities across essentially all servers. Based on our internal fleet data, and aligned with studies from other hyperscalers such as Microsoft [33], memory is one of the largest single embodied-emissions contributors"

[8] U. Gupta, M. Elgamal, G. Hills, G.-Y. Wei, H.-H. S. Lee, D. Brooks, and C.-J. Wu, “ACT: Designing Sustainable Computer Systems with an Architectural Carbon Modeling Tool,” in Proceedings of the 49th Annual International Symposium on Computer Architecture (ISCA’22), 2022.

[4] D. Azevedo, M. Patterson, J. Pouchet, and R. Tipley, “Carbon usage effectiveness (cue): A green grid data center sustainability metric,” White paper, vol. 32, 2010.

[33] J. Wang, D. S. Berger, F. Kazhamiaka, C. Irvene, C. Zhang, E. Choukse, K. Frost, R. Fonseca, B. Warrier, C. Bansal, J. Stern, R. Bianchini, and A. Sriraman, “Designing Cloud Servers for Lower Carbon,” in Proceedings of the 51st Annual International Symposium on Computer Architecture, ser. ISCA ’24, 2025, p. 452–470.

Not a reference, but I found https://www.interface-eu.org/publications/semiconductor-emis... which goes into great detail on the subject. I hadn't realized there were significant emissions of fluorinated gases directly from the fabs, which is mildly alarming. Although it looks like there has been a crackdown on this either politically or through ESG policies.