The chips act used tax dollars and subsidies to incentivize companies to build here. This and tariffs on semis are not much different the only difference is with a tariff you only pay the tax when you buy imported goods
Subsidies ensure a certain sector has money. CHIPS pays for semiconductor fabs no matter what. Tariffing foreign semiconductors doesn't ensure there will be money for semiconductor fabs here - there could just be no semiconductors at all.
Tariffs are much more regressive than our normal tax policy. Which is probably the reason this administration prefers them.